xLight
Startup · 1,085 ATTENDEES REACHED

xLight develops particle accelerator-driven free electron lasers as utility-scale light sources for extreme ultraviolet lithography in semiconductor fabrication facilities. The FEL systems accelerate electrons using radiofrequency and magnetic fields through undulators to produce coherent, high-intensity, tunable light beams down to 2nm wavelengths, with prototypes offering 1000W to 3000W power outputs. These lasers target semiconductor manufacturers seeking higher EUV power, lower costs, and improved wafer throughput. Founded in 2021 by Nicholas Kelez, who serves as CEO and CTO, the company has Pat Gelsinger, former Intel CEO, as Executive Chairman. xLight raised a $40 million oversubscribed Series B in July 2025 led by Playground Global, with Morpheus Ventures, Marvel Capital, and IAG Capital Partners participating. In December 2025, it signed a letter of intent with the U.S. Department of Commerce for up to $150 million CHIPS Act equity investment. Headquartered in Palo Alto, California, xLight plans to build its first FEL system at the Albany NanoTech Complex in New York.

02 BY THE NUMBERS
2
EVENTS PARTICIPATED
1,085
ATTENDEES REACHED
2
SPEAKERS BROUGHT
2
CITIES
2
PRESENTATIONS
04 ORGANIZATIONS THAT OFTEN APPEAR TOGETHER
DEEP TECH WEEK · ORGANIZATIONS / XLIGHT LAST INDEXED · MAY 11, 2026